Individually addressable and flexible pressure sensor matrixes with ZnO nanotube arrays on graphene
نویسندگان
چکیده
Abstract We report the fabrication of individually addressable, high-density, vertical zinc oxide (ZnO) nanotube pressure sensor arrays. High-sensitivity and flexible piezoelectric sensors were fabricated using dimension- position-controlled, vertical, free-standing ZnO nanotubes on a graphene substrate. Significant pressure/force responses achieved from small devices composed only single, 3 × 3, 5 5, 250 arrays graphene. An addressable pixel matrix was by arranging top bottom electrodes in crossbar configuration. investigated uniformity robustness spatial mapping considering size, number each pixel, lateral dimensions individual nanotubes. A resolution as high 1058 dpi for Schottky diode-based force/pressure Additionally, we confirmed excellent flexibility electrical high-resolution tactile imaging. believe that this work opens important opportunities 1D with enormous applications human-electronics interfaces, smart skin, micro- nanoelectromechanical systems.
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ژورنال
عنوان ژورنال: Npg Asia Materials
سال: 2022
ISSN: ['1884-4049', '1884-4057']
DOI: https://doi.org/10.1038/s41427-022-00386-4